A micromirror-based laser scanning system is developed to obtain images. With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely. To evaluate the tracking performance of the closed-loop system, triangular waves with different frequencies are used as desired traces. The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control. In this paper, we present a twisting control scheme with proportional-integral-derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of the proposed scheme in a laser scanning system. He is a Fellow of the Engineering Institute of Canada.(e-mail: Corresponding author: He is the Editor-in-Chief of the IEEE Nanotechnology Magazine, an Associate Editor of the IEEE Transactions of Nanotechnology, and a member of the Editorial Board of Scientific Reports (Nature Publishing Group). He is currently the Canada Research Chair in Micro/Nanodevices. Colton's Medal of Research Excellence, Micralyne Microsystems Design Award, Ontario Ministry of Research and Innovation's Early Researcher Award, and University of Toronto Alumni Association 7T6 Early Career Award. He is the recipient of the Professional Engineering Ontario Engineering Medal, Natural Science & Engineering Research Canada Innovation Challenge Award, Douglas R. His current research interests include developing miniaturized biomedical instruments. He is currently a Faculty Member in the Department of Systems Design Engineering at University of Waterloo, Waterloo, ON, Canada. degrees in mechanical and industrial engineering from the University of Toronto, Toronto, ON, Canada, in 1997, 1999, and 2003, respectively. degree in electrical and computer engineering, and M.A.Sc. His research interests include control theory and applications, robotics and automation, dynamical analysis and control of micro/nano devices.(e-mail: Tze Wei Yeow (S'99-M'03-SM'08) received the B.A.Sc. He is currently an Associate Professor at the College of Automation Science and Engineering, South China University of Technology, China. degree in control theory and control engineering from South China University of Technology, China, in 20, respectively. degree in control theory and control engineering from Fuzhou University, China, and the Ph.D. His research interests include nonlinear control systems, switched and hybrid systems, and nano-micro-electronic systems.(e-mail: Sun received the M.S. He is an Associate Editor of IEEE Transactions on Automatic Control and a Subject Editor of International Journal of Robust and Nonlinear Control. He was supported by the National Distinguished Young Talents' Foundation, and is supported by the 100-talent plan of Chinese Academy of Sciences. He is the first author of the monographs "Switched Linear Systems-Control and Design" and "Stability Theory of Switched Dynamical Systems" (London: Springer, 20). His research interests include robust nonlinear control, and the application of nonlinear control theory to microelectromechanical system (MEMS).(e-mail: Sun is currently a Researcher with the Key Laboratory of Systems Control, Academy of Mathematics and Systems Science, Chinese Academy of Sciences. He is currently with the School of Computer and Information Engineering, Henan University, China. He won the Best Student Paper Award from the 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale in 2012, and Poster Award from the 34th Chinese Control Conference in 2015. student in the Department of Systems Design Engineering at University of Waterloo, Waterloo, ON, Canada. From 2011 to 2013, he was a visiting Ph.D. degree in control theory and control engineering from South China University of Technology, China in 2014. Hui Chen received the B.Sc., M.A.S.c degrees at the School of Electrical Engineering and Automation from Henan Polytechnic University, China, in 20, respectively, and the Ph.D.
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